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产品详情

Nanopatterned Silicon Stamps

产品描述:

    LightSmyth提供种类繁多的纳米制造单结晶硅基底,为纳米光子学研究行业和学术机构提供了一个低成本应用的方案。可用于各种应用在光学、光子学、生物学、化学、物理学(如中子散射)、高分子材料研究、纳米、微流体和其他的基板。如果需要的话,可以在基板进行金属或介电材料镀膜。大多数截面型材的表面特征略呈梯形,有直线平行的台地和沟槽以及格状结构。可提供多种特征尺寸和沟槽深度。基板的SEM图像,可以在装运之前进行更新的确认。
新的纳米标记现货会不断地增加。如果在产品列表中找不到需要的纳米结构产品,敬请致电亚太区的销售代表,他会帮您联系我们的科学家。
订货须知:价格如有变更,恕不另行通知。订单总价格将包括装卸和运输费用。产品总价低于$250.00的订单,手续费增加$75.00添,其他情况手续费为5.00美元。航运选项和定价,请参阅订购表格http://www.lightsmyth.com/downloads/ordering/order_form.pdf
表中所示的尺寸为目标值。凹槽的深度和线宽和空间与目标值有15%范围内的差别时,周期精度将优于0.5%。给出的 SEM仅用于演示说明。如需更精确的尺寸信息,可在订单中勾选提供指定纳米标记的SEM的服务。

产品规格:


Description

Value

Substrate Width and Height Tolerance

standard tolerance ± 0.2 mm

Clear Aperture (CA)

0.5 mm from substrate edge (the pattern may extend to the edge of the substrate)

Substrate Thickness

0.675 ± 0.050 mm

Surface Quality in CA

P/N ends with "-P": 60/40 scratch/dig: 0.06 mm maximum scratch width, 0.4 mm maximum dig diameter. up to 20/10 specification may be provided at a premium

Surface Quality in CA

P/N ends with "-S": Discounted grade due to surface quality. Has at least 80% of usable area. Up to 80/100 scratch/dig/particles and irregular substrate shape may present

Surface Quality outside of CA

no requirements

Material

Single crystal silicon, reactive ion etch


线性纳米标记 (行+空间):


Period

Groove depth

Duty cycle 1

Line width 2

Size 3

Part number

Price

SEM link1

SEM link2

139 nm

50 nm

50%

69.5 nm

12.5×12.5×0.7 mm

SNS-C72-1212-50-P

$290.00 ea.

X-sec

Top down

139 nm

50 nm

50%

69.5 nm

25×25×0.7 mm 5

SNS-C72-2525-50-P

$470.00 ea.

X-sec

Top down

278 nm

110 nm

50%

139 nm

12.5×12.5×0.7 mm

SNS-C36-1212-110-S 4

$95.00 ea.

X-sec

Top down

416.6 nm

110 nm

50%

208 nm

12.5×12.5×0.7 mm

SNS-C24-1212-110-P

$185.00 ea.

X-sec

Top down

500 nm

multiple6

44%

220 nm

8×8.3×0.7 mm

SNS-C20-0808-xxx-D45-P

$185.00 ea.

Top down

500 nm

multiple6

60%

300 nm

8×8.3×0.7 mm

SNS-C20-0808-xxx-D60-P

$185.00 ea.

Top down

555.5 nm

110 nm

50%

278 nm

20×9×0.7 mm

SNS-C18-2009-110-D50-P

$185.00 ea.

X-sec

Top down

555.5 nm

140 nm

50%

278 nm

20×9×0.7 mm

SNS-C18-2009-140-D50-P

$185.00 ea.

X-sec

Top down

555.5 nm

110 nm

29%

158 nm

20×9×0.7 mm

SNS-C18-2009-110-D29-P

$185.00 ea.

X-sec

Top down

555.5 nm

140 nm

29%

158 nm

20×9×0.7 mm

SNS-C18-2009-140-D29-P

$185.00 ea.

X-sec

Top down

600 nm

multiple6

43%

260 nm

8×8.3×0.7 mm

SNS-C16.7-0808-xxx-D45-P

$185.00 ea.

Top down

600 nm

multiple6

55%

330 nm

8×8.3×0.7 mm

SNS-C16.7-0808-xxx-D55-P

$185.00 ea.

Top down

606 nm

190 nm

50%

303 nm

29×12×0.7 mm

SNS-C16.5-2912-190-P

$245.00 ea.

X-sec

Top down

606 nm

190 nm

50%

303 nm

29×12×0.7 mm

SNS-C16.5-2912-190-S 4

$90.00 ea.

X-sec

Top down

606 nm

190 nm

50%

303 nm

29×24.2×0.7 mm5

SNS-C16.5-2924-190-P

$380.00 ea.

X-sec

Top down

675 nm

170 nm

32%

218 nm

24×10×0.7 mm

SNS-C14.8-2410-170-P

$245.00 ea.

675 nm

170 nm

32%

218 nm

24×30.4×0.7 mm5

SNS-C14.8-2430-170-P

$380.00 ea.

700 nm

multiple6

47%

330 nm

8×8.3×0.7 mm

SNS-C14.3-0808-xxx-D45-P

$185.00 ea.

Top down

700 nm

multiple6

55%

375 nm

8×8.3×0.7 mm

SNS-C14.3-0808-xxx-D55-P

$185.00 ea.

Top down

833.3 nm

200 nm

50%

416 nm

12.5×12.5×0.7 mm

SNS-C12-1212-200-P

$185.00 ea.

X-sec

Top down

833.3 nm

200 nm

50%

416 nm

25×25×0.7 mm 5

SNS-C12-2525-200-P

$380.00 ea.

X-sec

Top down

1 Duty cycle denotes ratio of line (mesa) width over period.

2 Indicates width value of mesa.

3 Second dimension corresponds to the groove length.

4 P/N ending with "-S" is "scientific" grade offered at a discount. It has at least 80% of usable area. Up to 80/100 scratch/dig/particles and irregular substrate shape may present. 

5 Larger custom sizes available-please call

6 Depth options of 150, 250 and 350 nm available. To order a particular depth, replace "xxx" in the part number with "150", "250", or "350", respectively.


2D纳米标记(矩形和六边形格):


Period

Lattice type

Groove depth

Feature width

Size

Part number

Price

SEM link1

500 nm

rect post

multiple 1

135 nm

8×8.3×0.7 mm

S2D-24B1-0808-xxx-P

$185.00 ea.

Top down

500 nm

rect post

multiple 1

210 nm

8×8.3×0.7mm

S2D-18B1-0808-xxx-P

$185.00 ea.

Top down

600 nm

rect post

multiple 1

195 nm

8×8.3×0.7mm

S2D-24B2-0808-xxx-P

$185.00 ea.

Top down

600 nm

rect post

multiple 1

275 nm

8×8.3×0.7mm

S2D-18B2-0808-xxx-P

$185.00 ea.

Top down

700 nm

rect post

multiple 1

260 nm

8×8.3×0.7mm

S2D-24B3-0808-xxx-P

$185.00 ea.

Top down

700 nm

rect post

multiple 1

350 nm

8×8.3×0.7mm

S2D-18B3-0808-xxx-P

$185.00 ea.

Top down

500 nm

hex post

multiple 1

165 nm

8×8.3×0.7mm

S2D-18C1-0808-xxx-P

$185.00 ea.

Top down

600 nm

hex post

multiple 1

165 nm

8×8.3×0.7mm

S2D-24C2-0808-xxx-P

$185.00 ea.

Top down

600 nm

hex post

multiple 1

240 nm

8×8.3×0.7mm

S2D-18C2-0808-xxx-P

$185.00 ea.

Top down

700 nm

hex post

multiple 1

220 nm

8×8.3×0.7mm

S2D-24C3-0808-xxx-P

$185.00 ea.

Top down

700 nm

hex post

multiple 1

290 nm

8×8.3×0.7mm

S2D-18C3-0808-xxx-P

$185.00 ea.

Top down

600 nm

hex hole

multiple 1

180 nm

8×8.3×0.7mm

S2D-24D2-0808-xxx-P

$185.00 ea.

Top down

700 nm

hex hole

multiple 1

200 nm

8×8.3×0.7mm

S2D-18D3-0808-xxx-P

$185.00 ea.

Top down

700 nm

hex hole

multiple 1

290 nm

8×8.3×0.7mm

S2D-24D3-0808-xxx-P

$185.00 ea.

Top down

1 Depth options of 150, 250 and limited selection of 350 nm available. To order a particular depth, replace "xxx" in the part number with "150", "250", or "350", respectively.